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BSGS大宗特气系统

2019-12-10 11:48:07 091大神在线观免费观看

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91大神在线观免费观看大宗特气系统(BSGS)作为半导体生产过程中必不可少的系统,高纯气体系统直接影响全厂生产的运行和产品的质量。相比较而   言,集成电路芯片制造厂由于工艺技术难度更高、生产过程更为复杂,因而所需的气体种类更多、品质要求更高、用量更大,也就更具代表性。,此系统是在气柜基础上开发的,可以持续进行超大流量不间断供应的特气供应系统.


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组成大宗特气供应系统(BSGS)91大神在线观免费观看主要适用于:Semiconductor、TFT、Sun Solar等工厂特气的集中供气,本文重点以集成电路芯片制造厂为背景来阐述。

大宗特气供气系统的设计

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